Inventor · disambiguated record

Yoshihiro Haruki

Also filed as: HARUKI YOSHIHIRO

2 granted patents·38 citations·filing 2003–2003

62Inventor score

Technology areasH10P

Files withSES CO LTD2

Top patents by PatentIndex Score

2 records

0177US7437834B2Method of processing substrate and substrate processing apparatusSES CO LTD·Filed 2003·Granted Oct 21, 2008·30 cites·7 claims
0256US7648580B2Substrate processing method and substrate processing deviceSES CO LTD·Filed 2003·Granted Jan 19, 2010·8 cites·4 claims

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