Inventor · disambiguated record
Sergei A. Zotov
Also filed as: ZOTOV SERGEI · ZOTOV SERGEI A
7 granted patents·67 citations·filing 2010–2016
85Inventor score
Top patents by PatentIndex Score
7 records- 0195US9696340B2Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulationUNIV CALIFORNIA·Filed 2016·Granted Jul 4, 2017·9 cites·9 claims
- 0292US8368154B2Three dimensional folded MEMS technology for multi-axis sensor systemsUNIV CALIFORNIA·Filed 2011·Granted Feb 5, 2013·19 cites·24 claims
- 0389US8991247B2High range digital angular rate sensor based on frequency modulationTRUSOV ALEXANDER·Filed 2011·Granted Mar 31, 2015·18 cites·10 claims
- 0484US10247554B2Fully balanced micro-machined inertial sensorUNIV CALIFORNIA·Filed 2015·Granted Apr 2, 2019·5 cites·12 claims
- 0583US8567247B2Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the sameSHKEL ANDREI M·Filed 2010·Granted Oct 29, 2013·7 cites·14 claims
- 0681US9274136B2Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulationUNIV CALIFORNIA·Filed 2013·Granted Mar 1, 2016·7 cites·9 claims
- 0765US9296133B2Method for batch fabrication of three-dimensional shellsUNIV CALIFORNIA·Filed 2013·Granted Mar 29, 2016·2 cites·13 claims
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