Inventor · disambiguated record
Henry A. Hill
Also filed as: BALLARD PAUL T · HILL HENRY A · HILL HENRY ALLEN · HILL JR HENRY A
146 granted patents·7 pending applications·4,917 citations·filing 1977–2019
99Inventor score
Top patents by PatentIndex Score
153 records- 0199US6445453B1Scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2000·Granted Sep 3, 2002·139 cites·53 claims
- 0298US6480285B1Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensationZETETIC INST·Filed 2000·Granted Nov 12, 2002·227 cites·92 claims
- 0398US6091496AMultiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensationZETETIC INST·Filed 1998·Granted Jul 18, 2000·305 cites·9 claims
- 0497US7283248B2Multi-axis interferometers and methods and systems using multi-axis interferometersZYGO CORP·Filed 2005·Granted Oct 16, 2007·44 cites·42 claims
- 0597US6775009B2Differential interferometric scanning near-field confocal microscopyZETETIC INST·Filed 2001·Granted Aug 10, 2004·94 cites·36 claims
- 0697US6753968B2Optical storage system based on scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2003·Granted Jun 22, 2004·62 cites·46 claims
- 0797US6606159B1Optical storage system based on scanning interferometric near-field confocal microscopyZETETIC INST·Filed 2000·Granted Aug 12, 2003·56 cites·49 claims
- 0897US6252668B1Systems and methods for quantifying nonlinearities in interferometry systemsZYGO CORP·Filed 2000·Granted Jun 26, 2001·106 cites·66 claims
- 0996US6847452B2Passive zero shear interferometersZYGO CORP·Filed 2002·Granted Jan 25, 2005·80 cites·80 claims
- 1096US6313918B1Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersionZYGO CORP·Filed 1999·Granted Nov 6, 2001·130 cites·94 claims
- 1196US6271923B1Interferometry system having a dynamic beam steering assembly for measuring angle and distanceZYGO CORP·Filed 1999·Granted Aug 7, 2001·174 cites·78 claims
- 1296US6246481B1Systems and methods for quantifying nonlinearities in interferometry systemsZYGO CORP·Filed 2000·Granted Jun 12, 2001·99 cites·27 claims
- 1396US6137574ASystems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometryZYGO CORP·Filed 1999·Granted Oct 24, 2000·148 cites·52 claims
- 1496US5760901AMethod and apparatus for confocal interference microscopy with background amplitude reduction and compensationZETETIC INST·Filed 1997·Granted Jun 2, 1998·165 cites·39 claims
- 1595US6541759B1Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detectionZYGO CORP·Filed 2000·Granted Apr 1, 2003·80 cites·43 claims
- 1694US7697195B2Apparatus for reducing wavefront errors in output beams of acousto-optic devicesZYGO CORP·Filed 2007·Granted Apr 13, 2010·20 cites·25 claims
- 1794US7298496B2Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometryZETETIC INST·Filed 2005·Granted Nov 20, 2007·34 cites·25 claims
- 1894US6888638B1Interferometry system having a dynamic beam steering assembly for measuring angle and distanceZYGO CORP·Filed 2000·Granted May 3, 2005·70 cites·56 claims
- 1994US6757066B2Multiple degree of freedom interferometerZYGO CORP·Filed 2003·Granted Jun 29, 2004·67 cites·73 claims
- 2094US6330065B1Gas insensitive interferometric apparatus and methodsZYGO CORP·Filed 1999·Granted Dec 11, 2001·115 cites·97 claims
- 2194US6201609B1Interferometers utilizing polarization preserving optical systemsZYGO CORP·Filed 1999·Granted Mar 13, 2001·119 cites·54 claims
- 2293US6806961B2Interferometric cyclic error compensationZYGO CORP·Filed 2002·Granted Oct 19, 2004·58 cites·60 claims
- 2393US6717736B1Catoptric and catadioptric imaging systemsZETETIC INST·Filed 2003·Granted Apr 6, 2004·61 cites·54 claims
- 2493US6525825B2Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 2002·Granted Feb 25, 2003·47 cites·2 claims
- 2593US6252667B1Interferometer having a dynamic beam steering assemblyZYGO CORP·Filed 1998·Granted Jun 26, 2001·101 cites·94 claims
- 2692US6847029B2Multiple-source arrays with optical transmission enhanced by resonant cavitiesZETETIC INST·Filed 2001·Granted Jan 25, 2005·51 cites·46 claims
- 2792US6842256B2Compensating for effects of variations in gas refractivity in interferometersZYGO CORP·Filed 2002·Granted Jan 11, 2005·55 cites·40 claims
- 2892US6839141B2Method and apparatus for compensation of time-varying optical properties of gas in interferometryZYGO CORP·Filed 2003·Granted Jan 4, 2005·51 cites·33 claims
- 2992US6552852B2Catoptric and catadioptric imaging systemsZETETIC INST·Filed 2001·Granted Apr 22, 2003·51 cites·22 claims
- 3092US6529279B2Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 2002·Granted Mar 4, 2003·43 cites·6 claims
- 3192US6157660AApparatus for generating linearly-orthogonally polarized light beamsZYGO CORP·Filed 2000·Granted Dec 5, 2000·55 cites·27 claims
- 3291US7379190B2Stage alignment in lithography toolsZYGO CORP·Filed 2005·Granted May 27, 2008·13 cites·39 claims
- 3391US6778280B2Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam componentsZYGO CORP·Filed 2002·Granted Aug 17, 2004·48 cites·48 claims
- 3491US6667809B2Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensationZETETIC INST·Filed 2001·Granted Dec 23, 2003·52 cites·28 claims
- 3591US6552805B2Control of position and orientation of sub-wavelength aperture array in near-field microscopyZETETIC INST·Filed 2001·Granted Apr 22, 2003·52 cites·32 claims
- 3690US6236507B1Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam componentsZYGO CORP·Filed 1998·Granted May 22, 2001·80 cites·40 claims
- 3790US6219144B1Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometryZYGO CORP·Filed 1999·Granted Apr 17, 2001·86 cites·100 claims
- 3889US6891624B2Cyclic error reduction in average interferometric position measurementsZYGO CORP·Filed 2002·Granted May 10, 2005·37 cites·43 claims
- 3988US6819434B2Multi-axis interferometerZYGO CORP·Filed 2003·Granted Nov 16, 2004·37 cites·62 claims
- 4088US6700665B2Interferometric apparatus for measuring the topography of mirrors in situ and providing error correction signals thereforZYGO CORP·Filed 2002·Granted Mar 2, 2004·30 cites·19 claims
- 4188US6407816B1Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 2000·Granted Jun 18, 2002·32 cites·8 claims
- 4288US6124931AApparatus and methods for measuring intrinsic optical properties of a gasZYGO CORP·Filed 1999·Granted Sep 26, 2000·72 cites·119 claims
- 4388US5838485ASuperheterodyne interferometer and method for compensating the refractive index of air using electronic frequency multiplicationZYGO CORP·Filed 1996·Granted Nov 17, 1998·74 cites·30 claims
- 4487US6950192B2Cyclic error compensation in interferometry systemsZYGO CORP·Filed 2003·Granted Sep 27, 2005·27 cites·67 claims
- 4587US6912054B2Interferometric stage systemZYGO CORP·Filed 2002·Granted Jun 28, 2005·24 cites·43 claims
- 4687US6631004B1Single-pass and multi-pass interferometry systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersionZYGO CORP·Filed 2001·Granted Oct 7, 2003·31 cites·22 claims
- 4787US6327039B1Interferometer and method for measuring the refractive index and optical path length effects of airZYGO CORP·Filed 1999·Granted Dec 4, 2001·73 cites·45 claims
- 4886US6710884B2Apparatus and method for measuring mirrors in situZYGO CORP·Filed 2001·Granted Mar 23, 2004·30 cites·21 claims
- 4986US6650419B2Interferometric apparatus for precision measurement of altitude to a surfaceZYGO CORP·Filed 2001·Granted Nov 18, 2003·27 cites·22 claims
- 5085US6791693B2Multiple-pass interferometryZYGO CORP·Filed 2003·Granted Sep 14, 2004·30 cites·52 claims
Showing the top 50 of 153 patent records by PatentIndex Score.
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