Inventor · disambiguated record
Isamu Sakuragi
Also filed as: SAKURAGI ISAMU
3 granted patents·4 pending applications·17 citations·filing 2006–2009
64Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0181US8821644B2Bevel/backside polymer removing method and device, substrate processing apparatus and storage mediumSAKURAGI ISAMU·Filed 2008·Granted Sep 2, 2014·12 cites·7 claims
- 0271US8021564B2Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Sep 20, 2011·4 cites·20 claims
- 0360US8187981B2Substrate processing method, substrate processing system, and computer-readable storage mediumTOMIOKA KAZUHIRO·Filed 2007·Granted May 29, 2012·1 cites·8 claims
- 0446US2009188428A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0545US2009188892A1Method of checking substrate edge processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0641US2008078325A1Processing system containing a hot filament hydrogen radical source for integrated substrate processingTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 0741US2008081464A1Method of integrated substrated processing using a hot filament hydrogen radical souceTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
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