Inventor · disambiguated record
Thomas Patrick Duffey
Also filed as: DUFFEY THOMAS · DUFFEY THOMAS P · DUFFEY THOMAS PATRICK
34 granted patents·2 pending applications·1,236 citations·filing 1998–2022
97Inventor score
Top patents by PatentIndex Score
36 records- 0198US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0298US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 0397US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0497US6240117B1Fluorine control system with fluorine monitorCYMER INC·Filed 1998·Granted May 29, 2001·205 cites·39 claims
- 0592USRE38054EReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 2001·Granted Apr 1, 2003·42 cites·37 claims
- 0692US6370174B1Injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 9, 2002·99 cites·23 claims
- 0790US9599510B2Estimation of spectral feature of pulsed light beamCymer LLC·Filed 2014·Granted Mar 21, 2017·6 cites·29 claims
- 0890US6330261B1Reliable, modular, production quality narrow-band high rep rate ArF excimer laserCYMER INC·Filed 1999·Granted Dec 11, 2001·105 cites·44 claims
- 0989US10451890B2Reducing speckle in an excimer light sourceCymer LLC·Filed 2017·Granted Oct 22, 2019·3 cites·42 claims
- 1087US11054665B2Reducing speckle in an excimer light sourceCymer LLC·Filed 2019·Granted Jul 6, 2021·3 cites·21 claims
- 1185US6034978AGas discharge laser with gas temperature controlCYMER INC·Filed 1999·Granted Mar 7, 2000·70 cites·28 claims
- 1283US7535948B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2006·Granted May 19, 2009·7 cites·26 claims
- 1382US11526083B2Spectral feature selection and pulse timing control of a pulsed light beamCymer LLC·Filed 2019·Granted Dec 13, 2022·2 cites·33 claims
- 1479US10288484B2Homogenization of light beam for spectral feature metrologyCymer LLC·Filed 2018·Granted May 14, 2019·2 cites·23 claims
- 1579US10228322B2Apparatus for and method of sensing fluorine concentrationCymer LLC·Filed 2017·Granted Mar 12, 2019·1 cites·1 claims
- 1677US11768438B2Spectral feature selection and pulse timing control of a pulsed light beamCymer LLC·Filed 2022·Granted Sep 26, 2023·0 cites·20 claims
- 1775US11686951B2Reducing speckle in an excimer light sourceCymer LLC·Filed 2021·Granted Jun 27, 2023·0 cites·20 claims
- 1875US10345714B2Lithography optics adjustment and monitoringCymer LLC·Filed 2017·Granted Jul 9, 2019·2 cites·30 claims
- 1975US8284815B2Very high power laser chamber optical improvementsYE HONG·Filed 2009·Granted Oct 9, 2012·5 cites·13 claims
- 2072US11777271B2Method of and apparatus for extending electrode life in a laser chamberCymer LLC·Filed 2018·Granted Oct 3, 2023·1 cites·22 claims
- 2168US9945730B2Adjusting an amount of coherence of a light beamCymer LLC·Filed 2016·Granted Apr 17, 2018·1 cites·28 claims
- 2267US8982922B2Very high power laser chamber optical improvementsYE HONG·Filed 2012·Granted Mar 17, 2015·2 cites·17 claims
- 2366US9246298B2Corrosion resistant electrodes for laser chambersCymer LLC·Filed 2013·Granted Jan 26, 2016·1 cites·16 claims
- 2465US10852227B2Apparatus for and method of sensing fluorine concentrationCymer LLC·Filed 2019·Granted Dec 1, 2020·0 cites·8 claims
- 2559US12169363B2Radiation source testingCymer LLC·Filed 2020·Granted Dec 17, 2024·0 cites·30 claims
- 2659US10267687B2Adjusting an amount of coherence of a light beamCymer LLC·Filed 2018·Granted Apr 23, 2019·0 cites·20 claims
- 2759US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 2858US12374853B2Control system for a plurality of deep ultraviolet optical oscillatorsCymer LLC·Filed 2020·Granted Jul 29, 2025·0 cites·19 claims
- 2957US7995637B2Gas discharge laser chamberCYMER INC·Filed 2009·Granted Aug 9, 2011·1 cites·25 claims
- 3056US10845711B2Lithography optics adjustment and monitoringCymer LLC·Filed 2019·Granted Nov 24, 2020·0 cites·20 claims
- 3154US2023017337A1Dual pulsed power system with independent voltage and timing control and reduced power consumptionCymer LLC·Filed 2020·Application pending·0 cites
- 3253US10012544B2Homogenization of light beam for spectral feature metrologyCymer LLC·Filed 2016·Granted Jul 3, 2018·0 cites·20 claims
- 3353US2016126689A1Corrosion Resistant Electrodes for Laser ChambersCymer LLC·Filed 2015·Application pending·0 cites
- 3447US10096967B2Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light sourceCymer LLC·Filed 2016·Granted Oct 9, 2018·0 cites·23 claims
- 3546US6330260B1F2 laser with visible red and IR controlCYMER INC·Filed 1999·Granted Dec 11, 2001·12 cites·31 claims
- 3624US10074953B2Erosion resistant electrodes for use in generating gas discharge laserLUO SIQI·Filed 2015·Granted Sep 11, 2018·0 cites·15 claims
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