Inventor · disambiguated record
Hao-Kuang Chiu
Also filed as: CHIU HAO-KUANG
8 granted patents·1 pending application·109 citations·filing 1997–2010
87Inventor score
Top patents by PatentIndex Score
9 records- 0175US6293850B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 25, 2001·28 cites·13 claims
- 0275US6183350B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Feb 6, 2001·28 cites·10 claims
- 0357US6106714AFiltering apparatus with stirrer in a CMP apparatusUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 22, 2000·23 cites·6 claims
- 0443US6062963ARetainer ring design for polishing head of chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 16, 2000·10 cites·10 claims
- 0542US6241582B1Chemical mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1998·Granted Jun 5, 2001·6 cites·20 claims
- 0640US6030892AMethod of preventing overpolishing in a chemical-mechanical polishing operationUNITED MICROELECTRONICS CORP·Filed 1997·Granted Feb 29, 2000·8 cites·20 claims
- 0736US6228420B1Method to maintain consistent thickness of thin film deposited by chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 8, 2001·6 cites·5 claims
- 0832US2011014858A1Grooved cmp polishing padCABOT MICROELECTRONICS CORP·Filed 2010·Application pending·0 cites
- 0930US6234876B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 22, 2001·0 cites·8 claims
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