Inventor · disambiguated record
Juen-Kuen Lin
Also filed as: LIN JUEN-KUEN
17 granted patents·1 pending application·275 citations·filing 1998–2002
94Inventor score
Files withUNITED MICROELECTRONICS CORP18
Top patents by PatentIndex Score
18 records- 0191US6120366AChemical-mechanical polishing padUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·99 cites·10 claims
- 0284US6220930B1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 24, 2001·23 cites·9 claims
- 0375US6293850B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 25, 2001·28 cites·13 claims
- 0475US6183350B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Feb 6, 2001·28 cites·10 claims
- 0572US6341995B1Chemical mechanical polishing apparatusUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jan 29, 2002·15 cites·13 claims
- 0671US6721628B1Closed loop concentration control system for chemical mechanical polishing slurryUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 13, 2004·16 cites·18 claims
- 0764US6569771B2Carrier head for chemical mechanical polishingUNITED MICROELECTRONICS CORP·Filed 2002·Granted May 27, 2003·10 cites·13 claims
- 0856US6352244B2Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2001·Granted Mar 5, 2002·2 cites·2 claims
- 0956US6322057B1Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2000·Granted Nov 27, 2001·2 cites·1 claims
- 1043US6062963ARetainer ring design for polishing head of chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 16, 2000·10 cites·10 claims
- 1142US6241582B1Chemical mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1998·Granted Jun 5, 2001·6 cites·20 claims
- 1241US6206758B1Method for increasing working life of retaining ring in chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Mar 27, 2001·9 cites·11 claims
- 1340US6119294ACleaning system with automatically controlled brush pressureUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·8 cites·24 claims
- 1438US2001000770A1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Application pending·0 cites
- 1537US6096162AChemical mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 1, 2000·7 cites·9 claims
- 1636US6228420B1Method to maintain consistent thickness of thin film deposited by chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 8, 2001·6 cites·5 claims
- 1735US6051139ADevice for filtering slurryUNITED MICROELECTRONICS CORP·Filed 1998·Granted Apr 18, 2000·6 cites·5 claims
- 1830US6234876B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 22, 2001·0 cites·8 claims
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