Inventor · disambiguated record
Yuusuke Sato
Also filed as: SATO YUUSUKE
50 granted patents·66 pending applications·1,519 citations·filing 1992–2019
98Inventor score
Top patents by PatentIndex Score
116 records- 0198US5474612AVapor-phase deposition apparatus and vapor-phase deposition methodTOSHIBA KK·Filed 1994·Granted Dec 12, 1995·445 cites·5 claims
- 0297US5897710ASubstrate processing apparatus and substrate processing methodTOSHIBA KK·Filed 1998·Granted Apr 27, 1999·384 cites·5 claims
- 0396US7192626B2Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor depositionAIR LIQUIDE·Filed 2003·Granted Mar 20, 2007·115 cites·16 claims
- 0493US10550473B2Shower head, vapor phase growth apparatus, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Feb 4, 2020·3 cites·8 claims
- 0592US10407772B2Shower head, vapor phase growth apparatus, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Sep 10, 2019·3 cites·16 claims
- 0690US5766360ASubstrate processing apparatus and substrate processing methodTOSHIBA KK·Filed 1993·Granted Jun 16, 1998·123 cites·13 claims
- 0789US9869035B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 16, 2018·3 cites·8 claims
- 0889US7681760B2Liquid cartridgeTOSHIBA KK·Filed 2008·Granted Mar 23, 2010·9 cites·17 claims
- 0988US9624603B2Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the sameNUFLARE TECHNOLOGY INC·Filed 2014·Granted Apr 18, 2017·4 cites·11 claims
- 1088US5527393AVapor-phase deposition apparatus and vapor-phase deposition methodTOSHIBA KK·Filed 1995·Granted Jun 18, 1996·81 cites·8 claims
- 1187US10132001B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 20, 2018·2 cites·14 claims
- 1287US7479338B2Fuel cell systemTOSHIBA KK·Filed 2005·Granted Jan 20, 2009·8 cites·21 claims
- 1387US5344492AVapor growth apparatus for semiconductor devicesTOSHIBA KK·Filed 1993·Granted Sep 6, 1994·60 cites·11 claims
- 1484US10109483B2Vapor phase growth apparatus, storage container, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Oct 23, 2018·4 cites·13 claims
- 1584US9803282B2Vapor phase growth apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Oct 31, 2017·6 cites·14 claims
- 1684US6113705AHigh-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film methodTOSHIBA CERAMICS CO·Filed 1998·Granted Sep 5, 2000·68 cites·6 claims
- 1782USD797690SHeater for semiconductor manufacturing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Sep 19, 2017·23 cites·1 claims
- 1880US11047047B2Shower head, vapor phase growth apparatus, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jun 29, 2021·0 cites·11 claims
- 1978US6074696ASubstrate processing method which utilizes a rotary member coupled to a substrate holder which holds a target substrateTOSHIBA KK·Filed 1997·Granted Jun 13, 2000·54 cites·19 claims
- 2077US10920317B2Shower head, vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Feb 16, 2021·2 cites·10 claims
- 2176US10385474B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Aug 20, 2019·2 cites·8 claims
- 2275US7709130B2Fuel cellTOSHIBA KK·Filed 2008·Granted May 4, 2010·3 cites·14 claims
- 2375US7597990B2Fuel cell and fuel cell systemTOSHIBA KK·Filed 2006·Granted Oct 6, 2009·2 cites·14 claims
- 2474USD798250SHeaterNUFLARE TECHNOLOGY INC·Filed 2016·Granted Sep 26, 2017·15 cites·1 claims
- 2573US7615295B2Hydrogen generator and fuel cell systemTOSHIBA KK·Filed 2005·Granted Nov 10, 2009·2 cites·23 claims
- 2670US9735003B2Film-forming apparatus and film-forming methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Aug 15, 2017·2 cites·11 claims
- 2770US7264897B2Fuel cell systemTOSHIBA KK·Filed 2003·Granted Sep 4, 2007·7 cites·7 claims
- 2868US2014370691A1Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 2967US10237917B2Heater and apparatus for manufacturing semiconductor device using heaterNUFLARE TECHNOLOGY INC·Filed 2016·Granted Mar 19, 2019·1 cites·3 claims
- 3065US2017275755A1Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2017·Application pending·0 cites
- 3164US8124291B2Fuel cell system and control method thereofYAGI RYOSUKE·Filed 2008·Granted Feb 28, 2012·1 cites·26 claims
- 3262US2010025385A1Flow path structure, production method thereof and fuel cell systemTOSHIBA KK·Filed 2009·Application pending·0 cites
- 3359US9194056B2Film-forming apparatus and methodSUZUKI KUNIHIKO·Filed 2012·Granted Nov 24, 2015·0 cites·12 claims
- 3458US7678481B2Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressureTOSHIBA KK·Filed 2006·Granted Mar 16, 2010·0 cites·11 claims
- 3558US7597982B2Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathodeTOSHIBA KK·Filed 2003·Granted Oct 6, 2009·3 cites·4 claims
- 3658US7563524B2Fuel cell systemTOSHIBA KK·Filed 2003·Granted Jul 21, 2009·4 cites·14 claims
- 3758US6022806AMethod of forming a film in recess by vapor phase growthTOSHIBA KK·Filed 1995·Granted Feb 8, 2000·29 cites·17 claims
- 3857US10011901B2Vapor deposition method and vapor deposition apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jul 3, 2018·0 cites·12 claims
- 3957US9916996B2Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unitNUFLARE TECHNOLOGY INC·Filed 2015·Granted Mar 13, 2018·1 cites·5 claims
- 4057US9546435B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jan 17, 2017·0 cites·11 claims
- 4157US8053120B2Fuel cell system and control method thereofTOSHIBA KK·Filed 2006·Granted Nov 8, 2011·0 cites·9 claims
- 4257US6365231B2Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition processTOSHIBA KK·Filed 1999·Granted Apr 2, 2002·19 cites·8 claims
- 4356US2008145742A1Fuel cell unitTOSHIBA KK·Filed 2008·Application pending·0 cites
- 4456US2009162712A1Fuel cellTOSHIBA KK·Filed 2008·Application pending·0 cites
- 4556US2015013594A1Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 4655US11124894B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Sep 21, 2021·0 cites·5 claims
- 4755US2010233566A1Fuel cell and fuel cell systemTOSHIBA KK·Filed 2008·Application pending·0 cites
- 4855US2013220377A1Method of cleaning a film-forming apparatusAIR LIQUIDE US·Filed 2013·Application pending·0 cites
- 4954US8263282B2Fuel cell system and control method thereofYAGI RYOSUKE·Filed 2007·Granted Sep 11, 2012·0 cites·11 claims
- 5054US7927760B2Methods to control water flow and distribution in direct methanol fuel cellsPENN STATE RES FOUND·Filed 2004·Granted Apr 19, 2011·2 cites·25 claims
Showing the top 50 of 116 patent records by PatentIndex Score.
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