Inventor · disambiguated record

Eiichi Matsuzawa

Also filed as: MATSUZAWA EIICHI

2 granted patents·19 citations·filing 2008–2018

57Inventor score

Technology areasG01R H10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0188US7701236B2Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a waferTOKYO ELECTRON LTD·Filed 2008·Granted Apr 20, 2010·16 cites·17 claims
0285US10823778B2Inspection systemTOKYO ELECTRON LTD·Filed 2018·Granted Nov 3, 2020·3 cites·16 claims

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