Inventor · disambiguated record
Hidetatsu Isokawa
Also filed as: ISOKAWA HIDETATSU
8 granted patents·1 pending application·3 citations·filing 2017–2021
73Inventor score
Files withEBARA CORP9
Top patents by PatentIndex Score
9 records- 0176US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0268US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 0353US11541502B2Substrate processing apparatusEBARA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·9 claims
- 0446US12119246B2Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing deviceEBARA CORP·Filed 2021·Granted Oct 15, 2024·0 cites·24 claims
- 0543US10957546B2Substrate processing apparatus and method of controlling the sameEBARA CORP·Filed 2018·Granted Mar 23, 2021·0 cites·5 claims
- 0642US2019378740A1Teaching apparatus and teaching method for substrate transfer systemEBARA CORP·Filed 2019·Application pending·0 cites
- 0741US11380561B2Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning deviceEBARA CORP·Filed 2018·Granted Jul 5, 2022·0 cites·8 claims
- 0834US11173523B2Substrate processing apparatusEBARA CORP·Filed 2019·Granted Nov 16, 2021·0 cites·10 claims
- 0934US10845777B2Teaching device and teaching methodEBARA CORP·Filed 2017·Granted Nov 24, 2020·0 cites·14 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →