Inventor · disambiguated record

Atsushi Rikukawa

Also filed as: RIKUKAWA ATSUSHI

1 granted patent·13 citations·filing 2013–2013

35Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0187US9305817B2Method for purging a substrate containerTOKYO ELECTRON LTD·Filed 2013·Granted Apr 5, 2016·13 cites·11 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →