Inventor · disambiguated record

Shigeki Amemiya

Also filed as: AMEMIYA SHIGEKI

2 granted patents·16 citations·filing 2013–2013

56Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0187US9305817B2Method for purging a substrate containerTOKYO ELECTRON LTD·Filed 2013·Granted Apr 5, 2016·13 cites·11 claims
0268US10010913B2Purging apparatus and purging method for substrate storage containerTOKYO ELECTRON LTD·Filed 2013·Granted Jul 3, 2018·3 cites·9 claims

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