Inventor · disambiguated record
Kenneth C. Johnson
Also filed as: JOHNSON KENNETH · JOHNSON KENNETH C · JOHNSON KENNETH CARLISLE · JOHNSON KENNETH N
81 granted patents·4 pending applications·4,882 citations·filing 1975–2024
99Inventor score
Files withJOHNSON KENNETH C14TOKYO ELECTRON LTD14LITTELL MACHINE CO F J10LITTELL INTERNATIONAL INC8THERMA WAVE INC8
Top patents by PatentIndex Score
85 records- 0199US9612370B1EUV light source with spectral purity filter and power recyclingJOHNSON KENNETH C·Filed 2016·Granted Apr 4, 2017·30 cites·17 claims
- 0299US9188874B1Spot-array imaging system for maskless lithography and parallel confocal microscopyJOHNSON KENNETH C·Filed 2012·Granted Nov 17, 2015·52 cites·35 claims
- 0399US6819426B2Overlay alignment metrology using diffraction gratingsTHERMA WAVE INC·Filed 2002·Granted Nov 16, 2004·373 cites·31 claims
- 0499US6498685B1Maskless, microlens EUV lithography systemFiled 2000·Granted Dec 24, 2002·252 cites·33 claims
- 0599US6177980B1High-throughput, maskless lithography systemFiled 1999·Granted Jan 23, 2001·570 cites·1 claims
- 0699US6133986AMicrolens scanner for microlithography and wide-field confocal microscopyFiled 1997·Granted Oct 17, 2000·901 cites·35 claims
- 0798US6753961B1Spectroscopic ellipsometer without rotating componentsTHERMA WAVE INC·Filed 2001·Granted Jun 22, 2004·154 cites·29 claims
- 0898US6301000B1Dual-flexure light valveFiled 2000·Granted Oct 9, 2001·137 cites·5 claims
- 0997US6768967B2Database interpolation method for optical measurement of diffractive microstructuresTHERMA WAVE INC·Filed 2001·Granted Jul 27, 2004·110 cites·47 claims
- 1097US6188519B1Bigrating light valveFiled 2000·Granted Feb 13, 2001·87 cites·5 claims
- 1197US5859424AApodizing filter system useful for reducing spot size in optical measurements and other applicationsKLA TENCOR CORP·Filed 1997·Granted Jan 12, 1999·342 cites·69 claims
- 1297US4968355ATwo-axis tracking solar collector mechanismJOHNSON KENNETH C·Filed 1989·Granted Nov 6, 1990·110 cites·13 claims
- 1396US8994920B1Optical systems and methods for absorbance modulationJOHNSON KENNETH C·Filed 2011·Granted Mar 31, 2015·14 cites·1 claims
- 1496US6424404B1Multi-stage microlens arrayFiled 2000·Granted Jul 23, 2002·94 cites·5 claims
- 1595US7333200B2Overlay metrology method and apparatus using more than one grating per measurement directionTOKYO ELECTRON LTD·Filed 2006·Granted Feb 19, 2008·30 cites·8 claims
- 1695US7043397B2Reduced multicubic database interpolation method for optical measurement of diffractive microstructuresTOKYO ELECTRON LTD·Filed 2005·Granted May 9, 2006·26 cites·14 claims
- 1795US6947135B2Reduced multicubic database interpolation method for optical measurement of diffractive microstructuresTHERMA WAVE INC·Filed 2003·Granted Sep 20, 2005·63 cites·13 claims
- 1895US6628390B1Wafer alignment sensor using a phase-shifted microlens arrayFiled 2000·Granted Sep 30, 2003·83 cites·32 claims
- 1995US6392752B1Phase-measuring microlens microscopyFiled 2000·Granted May 21, 2002·86 cites·7 claims
- 2095US6340602B1Method of measuring meso-scale structures on wafersSENSYS INSTR·Filed 2001·Granted Jan 22, 2002·105 cites·20 claims
- 2194US7042569B2Overlay alignment metrology using diffraction gratingsTOKYO ELECTRON LTD·Filed 2004·Granted May 9, 2006·70 cites·12 claims
- 2294US6623991B2Method of measuring meso-scale structures on wafersTHERMA WAVE INC·Filed 2001·Granted Sep 23, 2003·57 cites·12 claims
- 2394US6489984B1Pixel cross talk suppression in digital microprintersFiled 2000·Granted Dec 3, 2002·59 cites·27 claims
- 2493US6806105B2Method of measuring meso-scale structures on wafersTHERMA WAVE INC·Filed 2003·Granted Oct 19, 2004·49 cites·2 claims
- 2593US5169456ATwo-axis tracking solar collector mechanismJOHNSON KENNETH C·Filed 1991·Granted Dec 8, 1992·98 cites·29 claims
- 2693US4372639ADirectional diffusing screenHUGHES AIRCRAFT CO·Filed 1981·Granted Feb 8, 1983·79 cites·5 claims
- 2792US6734968B1System for analyzing surface characteristics with self-calibrating capabilityFiled 1999·Granted May 11, 2004·110 cites·43 claims
- 2889US4047416AUncoiling and straightening apparatus for strip materialLITTELL MACHINE CO F J·Filed 1976·Granted Sep 13, 1977·18 cites·11 claims
- 2988US6804003B1System for analyzing surface characteristics with self-calibrating capabilityKLA TENCOR CORP·Filed 1999·Granted Oct 12, 2004·97 cites·138 claims
- 3088US5161057ADispersion-compensated fresnel lensJOHNSON KENNETH C·Filed 1990·Granted Nov 3, 1992·84 cites·2 claims
- 3187US7170604B2Overlay metrology method and apparatus using more than one grating per measurement directionTOKYO ELECTRON LTD·Filed 2003·Granted Jan 30, 2007·35 cites·5 claims
- 3286US9618313B1Methods for measuring distanceEPOCH CONCEPTS LLC·Filed 2015·Granted Apr 11, 2017·5 cites·24 claims
- 3386US7230704B2Diffracting, aperiodic targets for overlay metrology and method to detect gross overlayTOKYO ELECTRON LTD·Filed 2004·Granted Jun 12, 2007·29 cites·23 claims
- 3485US6070781ASystem for bringing the joint edges of sheet material into butting relationship for weldingLITTELL INTERNATIONAL INC·Filed 1997·Granted Jun 6, 2000·41 cites·14 claims
- 3584US4410057AEmergency hydraulic systemCLARK EQUIPMENT CO·Filed 1980·Granted Oct 18, 1983·35 cites·6 claims
- 3683US9182209B1Methods for measuring distanceEPOCH CONCEPTS LLC·Filed 2013·Granted Nov 10, 2015·7 cites·3 claims
- 3781US8687277B2Stacked-grating light modulatorJOHNSON KENNETH C·Filed 2011·Granted Apr 1, 2014·5 cites·8 claims
- 3880US7069153B2CD metrology methodTHERMA WAVE INC·Filed 2004·Granted Jun 27, 2006·16 cites·18 claims
- 3980US4123704AFrequency deviation digital display circuitSPERRY RAND CORP·Filed 1978·Granted Oct 31, 1978·27 cites·9 claims
- 4078US7069182B2Database interpolation method for optical measurement of diffractive microstructuresTOKYO ELECTRON LTD·Filed 2005·Granted Jun 27, 2006·6 cites·17 claims
- 4178US6667805B2Small-spot spectrometry instrument with reduced polarizationSENSYS INSTR CORP·Filed 2001·Granted Dec 23, 2003·15 cites·25 claims
- 4276US9097983B2Scanned-spot-array EUV lithography systemJOHNSON KENNETH C·Filed 2013·Granted Aug 4, 2015·2 cites·20 claims
- 4376US7116405B2Maskless, microlens EUV lithography system with grazing-incidence illumination opticsJOHNSON KENNETH C·Filed 2004·Granted Oct 3, 2006·13 cites·29 claims
- 4474US5814786ASystem and method for laser butt-weldingLITTELL INTERNATIONAL INC·Filed 1995·Granted Sep 29, 1998·25 cites·26 claims
- 4574US4022100AFastenerJOHNSON KENNETH C·Filed 1975·Granted May 10, 1977·32 cites·5 claims
- 4672US7215419B2Method and apparatus for position-dependent optical metrology calibrationTOKYO ELECTRON LTD·Filed 2006·Granted May 8, 2007·2 cites·17 claims
- 4772US7099081B2Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer thereforTOKYO ELECTRON LTD·Filed 2002·Granted Aug 29, 2006·10 cites·7 claims
- 4871US7095496B2Method and apparatus for position-dependent optical metrology calibrationTOKYO ELECTRON LTD·Filed 2002·Granted Aug 22, 2006·7 cites·21 claims
- 4971US6850333B1Optimized aperture shape for optical CD/profile metrologyTHERMA WAVE INC·Filed 2001·Granted Feb 1, 2005·16 cites·16 claims
- 5071US5932117AClamping system for sheet material in a welding systemLITTELL INTERNATIONAL INC·Filed 1997·Granted Aug 3, 1999·21 cites·11 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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