Inventor · disambiguated record

Sumio Yabe

Also filed as: YABE SUMIO

1 granted patent·14 citations·filing 2004–2004

36Inventor score

Technology areasH10P

Files withEBARA CORP1

Top patents by PatentIndex Score

1 record

0169US7578886B2Substrate processing apparatus, substrate processing method, and substrate holding apparatusEBARA CORP·Filed 2004·Granted Aug 25, 2009·14 cites·35 claims

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