Inventor · disambiguated record
Chuan-Huai Chen
Also filed as: CHEN CHUAN-HUAI
4 granted patents·35 citations·filing 1995–1999
74Inventor score
Technology areasH01J
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0172US6030508ASputter etching chamber having a gas baffle with improved uniformityTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Feb 29, 2000·24 cites·4 claims
- 0240US6942764B1Arc-sprayed shield for pre-sputter etching chamberTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted Sep 13, 2005·5 cites·8 claims
- 0336US6342135B1Sputter etching chamber with improved uniformityTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted Jan 29, 2002·3 cites·6 claims
- 0434US6436253B1Sputter etching chamber with improved uniformityTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Aug 20, 2002·3 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →