Inventor · disambiguated record
Antonius Franciscus Johannes De Groot
Also filed as: DE GROOT ANTONIUS FRANCISCUS JOHANNES
29 granted patents·3 pending applications·43 citations·filing 2010–2023
94Inventor score
Files withASML NETHERLANDS BV21BEERENS RUUD ANTONIUS CATHARINA MARIA3ASML HOLDING NV2HOL SVEN ANTOIN JOHAN2LAFARRE RAYMOND WILHELMUS LOUIS2
Top patents by PatentIndex Score
32 records- 0195US9507275B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·10 cites·20 claims
- 0288US11874607B2Method for providing a wear-resistant material on a body, and composite bodyASML NETHERLANDS BV·Filed 2020·Granted Jan 16, 2024·2 cites·20 claims
- 0388US10001713B2Lithographic apparatus and methodASML HOLDING NV·Filed 2014·Granted Jun 19, 2018·7 cites·15 claims
- 0486US10120292B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 6, 2018·2 cites·20 claims
- 0583US9726985B2Stage system and a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Aug 8, 2017·4 cites·15 claims
- 0682US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 0780US10747125B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Aug 18, 2020·1 cites·20 claims
- 0879US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 0979US8947640B2Positioning device, lithographic apparatus, positioning method and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 3, 2015·4 cites·20 claims
- 1076US10191392B2Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuatorASML NETHERLANDS BV·Filed 2015·Granted Jan 29, 2019·2 cites·24 claims
- 1175US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 1274US12032301B2Substrate support, lithographic apparatus and loading methodASML NETHERLANDS BV·Filed 2022·Granted Jul 9, 2024·0 cites·20 claims
- 1373US10684558B2Motor assembly, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 16, 2020·3 cites·22 claims
- 1469US11003095B2Positioning system and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted May 11, 2021·1 cites·22 claims
- 1567US8896811B2Positioning system and a method for positioning a substage with respect to a frameHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Nov 25, 2014·2 cites·20 claims
- 1666US10228626B2Movable support and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Mar 12, 2019·1 cites·20 claims
- 1765US8736815B2Position sensor and lithographic apparatusBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2011·Granted May 27, 2014·1 cites·18 claims
- 1864US8932042B2Lithographic apparatus and device manufacturing methodVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2011·Granted Jan 13, 2015·1 cites·21 claims
- 1962US9389518B2Stage system and a lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted Jul 12, 2016·1 cites·20 claims
- 2056US10908518B2Lithographic apparatus and methodASML HOLDING NV·Filed 2018·Granted Feb 2, 2021·0 cites·19 claims
- 2154US12315756B2Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of useASML NETHERLANDS BV·Filed 2020·Granted May 27, 2025·0 cites·20 claims
- 2254US11556063B2Substrate support, lithographic apparatus and loading methodASML NETHERLANDS BV·Filed 2017·Granted Jan 17, 2023·0 cites·20 claims
- 2352US11156924B2Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Oct 26, 2021·0 cites·15 claims
- 2448US9921494B2Lithographic apparatus comprising an actuator, and method for protecting such actuatorASML NETHERLANDS BV·Filed 2013·Granted Mar 20, 2018·0 cites·13 claims
- 2546US11421729B2Elastic guiding device, positioning device, blade and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 23, 2022·0 cites·13 claims
- 2645US9753381B2Substrate table system, lithographic apparatus and substrate table swapping methodASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·0 cites·11 claims
- 2744US2022082945A1Substrate holder for use in a lithographic apparatus and a method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 2840US9182683B2Lithographic apparatus and lithographic projection methodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2012·Granted Nov 10, 2015·0 cites·18 claims
- 2940US8472010B2Actuator, positioning system and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Jun 25, 2013·0 cites·9 claims
- 3040US2013077078A1Lithographic Apparatus and Substrate Handling MethodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Application pending·0 cites
- 3139US2012224161A1Lithographic Apparatus and MethodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2012·Application pending·0 cites
- 3233US8755030B2Lithographic apparatus and device manufacturing methodVALENTIN CHRISTIAAN LOUIS·Filed 2011·Granted Jun 17, 2014·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →