Inventor · disambiguated record
Koen Gerhardus Winkels
Also filed as: WINKELS KOEN GERHARDUS
8 granted patents·1 pending application·6 citations·filing 2013–2023
76Inventor score
Files withASML NETHERLANDS BV9
Top patents by PatentIndex Score
9 records- 0184US9442380B2Method and apparatus for generating radiationASML NETHERLANDS BV·Filed 2013·Granted Sep 13, 2016·4 cites·15 claims
- 0268US10481498B2Droplet generator for lithographic apparatus, EUV source and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Nov 19, 2019·1 cites·21 claims
- 0366US11709988B2Method for predicting resist deformationASML NETHERLANDS BV·Filed 2019·Granted Jul 25, 2023·1 cites·20 claims
- 0464US11914942B2Method for predicting resist deformationASML NETHERLANDS BV·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 0562US10904994B2Supply system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·0 cites·28 claims
- 0658US10499485B2Supply system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2018·Granted Dec 3, 2019·0 cites·25 claims
- 0754US12315756B2Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of useASML NETHERLANDS BV·Filed 2020·Granted May 27, 2025·0 cites·20 claims
- 0849US12242204B2Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrateASML NETHERLANDS BV·Filed 2020·Granted Mar 4, 2025·0 cites·20 claims
- 0940US2023048723A1Substrate table and method of handling a substrateASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →