Inventor · disambiguated record

Takeshi Rokukawa

Also filed as: ROKUKAWA TAKESHI

1 granted patent·12 citations·filing 2014–2014

34Inventor score

Technology areasG03F

Files withCANON KK1

Top patents by PatentIndex Score

1 record

0191US9804510B2Interferometer system, lithography apparatus, and article manufacturing methodCANON KK·Filed 2014·Granted Oct 31, 2017·12 cites·14 claims

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