Inventor · disambiguated record
Maria Elisabeth Reuhman-Huisken
Also filed as: REUHMAN-HUISKEN MARIA E · REUHMAN-HUISKEN MARIA ELISABET · REUHMAN-HUISKEN MARIA ELISABETH
8 granted patents·1 pending application·47 citations·filing 2004–2020
85Inventor score
Technology areasG03F
Top patents by PatentIndex Score
9 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0294US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0389US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 0486US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 0586US7916275B2Methods of characterizing similarity or consistency in a set of entitiesASML NETHERLANDS BV·Filed 2007·Granted Mar 29, 2011·9 cites·31 claims
- 0671US7889318B2Methods of characterizing similarity between measurements on entities, computer programs product and data carrierASML NETHERLANDS BV·Filed 2008·Granted Feb 15, 2011·3 cites·23 claims
- 0763US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 0858US7410735B2Method of characterization, method of characterizing a process operation, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·5 cites·31 claims
- 0938US2007002295A1System and method of monitoring and diagnosing system condition and performanceASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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