Inventor · disambiguated record
Kang-Min Paek
Also filed as: PAEK KANG MIN
1 granted patent·1 pending application·0 citations·filing 2013–2018
4Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0139US9620392B2Single type apparatus for drying a substrate and single type system for cleaning a substrate including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Apr 11, 2017·0 cites·21 claims
- 0236US2019189470A1Wafer cleaning apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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