Inventor · disambiguated record
Kiet A. Chau
Also filed as: CHAU KIET A
2 granted patents·4 citations·filing 2018–2021
43Inventor score
Files withEXOGENESIS CORP2
Top patents by PatentIndex Score
2 records- 0177US10670960B2Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beamsEXOGENESIS CORP·Filed 2018·Granted Jun 2, 2020·4 cites·13 claims
- 0260US11735432B2Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beamEXOGENESIS CORP·Filed 2021·Granted Aug 22, 2023·0 cites·19 claims
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