Inventor · disambiguated record
Erik Maria Rekkers
Also filed as: REKKERS ERIK MARIA
6 granted patents·22 citations·filing 2004–2019
77Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0181US9785051B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·5 cites·29 claims
- 0278US9927711B2Actuation mechanism, optical apparatus and lithography apparatusASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·3 cites·20 claims
- 0366US7307689B2Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearingASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·10 cites·22 claims
- 0452US9494878B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Nov 15, 2016·0 cites·15 claims
- 0549US7307688B2Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatusASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·4 cites·44 claims
- 0648US11131937B2Positioning device, stiffness reduction device and electron beam apparatusASML NETHERLANDS BV·Filed 2019·Granted Sep 28, 2021·0 cites·19 claims
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