Inventor · disambiguated record

Maurice Philippe Du Mee

Also filed as: DU MEE MAURICE PHILIPPE

1 granted patent·10 citations·filing 2004–2004

32Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

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1 record

0166US7307689B2Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearingASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·10 cites·22 claims

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