Inventor · disambiguated record
Soon Ee Neoh
Also filed as: NEOH SOON E · NEOH SOON EE
10 granted patents·162 citations·filing 1993–2000
90Inventor score
Files withCHARTERED SEMICONDUCTOR MFG10
Top patents by PatentIndex Score
10 records- 0182US5429912AMethod of dispensing fluid onto a waferCHARTERED SEMICONDUCTOR MFG·Filed 1993·Granted Jul 4, 1995·38 cites·8 claims
- 0270US6352904B2Alignment mark strategy for oxide CMPCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Mar 5, 2002·15 cites·10 claims
- 0360US6184104B1Alignment mark strategy for oxide CMPCHARTERED SEMICONDUCTOR MFG·Filed 1998·Granted Feb 6, 2001·23 cites·17 claims
- 0460US6146969APrinting optimized global alignment mark at contact/via layersCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Nov 14, 2000·30 cites·17 claims
- 0560US5562772ASubstrate coating apparatusCHARTERED SEMICONDUCTOR MFG·Filed 1995·Granted Oct 8, 1996·18 cites·11 claims
- 0648US6303451B1Method for forming a transistor within an integrated circuitCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Oct 16, 2001·16 cites·25 claims
- 0748US6235437B1Multi-segment global alignment markCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted May 22, 2001·10 cites·6 claims
- 0839US5470604AApparatus and method for spreading resist on a wafer and detecting bubbles in the resistCHARTERED SEMICONDUCTOR MFG·Filed 1994·Granted Nov 28, 1995·5 cites·6 claims
- 0937US6022649AWafer stepper method utilizing a multi-segment global alignment markCHARTERED SEMICONDUCTOR MFG·Filed 1998·Granted Feb 8, 2000·5 cites·9 claims
- 1030US6395086B1Shield for wafer stationCHARTERED SEMICONDUCTOR MFG·Filed 1995·Granted May 28, 2002·2 cites·8 claims
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