Inventor · disambiguated record
Chen-Hau Wu
Also filed as: WU CHEN-HAU
12 granted patents·119 citations·filing 2012–2019
87Inventor score
Top patents by PatentIndex Score
12 records- 0195US8741551B2Method and composition of a dual sensitive resistWU CHEN-HAU·Filed 2012·Granted Jun 3, 2014·99 cites·16 claims
- 0290US8932799B2Photoresist system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jan 13, 2015·10 cites·14 claims
- 0389US10365561B2Photoresist and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 30, 2019·2 cites·20 claims
- 0488US9581908B2Photoresist and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 28, 2017·7 cites·19 claims
- 0572US10114286B2Photoresist and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 30, 2018·1 cites·20 claims
- 0671US11073763B2Photoresist and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 0769US10514603B2Photoresist and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 24, 2019·0 cites·20 claims
- 0859US9989850B2Photoresist system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jun 5, 2018·0 cites·19 claims
- 0958US10276377B2Method for patterning interconnectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 30, 2019·0 cites·20 claims
- 1050US10036953B2Photoresist system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jul 31, 2018·0 cites·20 claims
- 1149US9529265B2Method of preparing and using photosensitive materialTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 27, 2016·0 cites·19 claims
- 1247US9773671B1Material composition and process for mitigating assist feature pattern transferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Sep 26, 2017·0 cites·20 claims
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