Inventor · disambiguated record
Hans J. Rutishauser
Also filed as: RUTISHAUSER HANS J
3 granted patents·96 citations·filing 1999–2003
75Inventor score
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
3 records- 0176US6194734B1Method and system for operating a variable aperture in an ion implanterAXCELIS TECH INC·Filed 1999·Granted Feb 27, 2001·32 cites·19 claims
- 0271US6207964B1Continuously variable aperture for high-energy ion implanterAXCELIS TECH INC·Filed 1999·Granted Mar 27, 2001·48 cites·20 claims
- 0363US6774378B1Method of tuning electrostatic quadrupole electrodes of an ion beam implanterAXCELIS TECH INC·Filed 2003·Granted Aug 10, 2004·16 cites·24 claims
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