Inventor · disambiguated record

Donald E. Deluca

Also filed as: DELUCA DONALD E

1 granted patent·48 citations·filing 1999–1999

48Inventor score

Technology areasH10P

Files withAXCELIS TECH INC1

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1 record

0171US6207964B1Continuously variable aperture for high-energy ion implanterAXCELIS TECH INC·Filed 1999·Granted Mar 27, 2001·48 cites·20 claims

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