Inventor · disambiguated record
Miki Shibata
Also filed as: SHIBATA MIKI
4 granted patents·122 citations·filing 1997–2003
79Inventor score
Top patents by PatentIndex Score
4 records- 0188US5885134APolishing apparatusEBARA CORP·Filed 1997·Granted Mar 23, 1999·81 cites·20 claims
- 0266US6992781B2Film thickness measuring method and measuring apparatus for organic thin film for use in organic electroluminesce devicePRESIDENT OF TOYAMA UNIVERSITY·Filed 2003·Granted Jan 31, 2006·15 cites·21 claims
- 0363US6074276APolishing apparatusEBARA CORP·Filed 1998·Granted Jun 13, 2000·22 cites·5 claims
- 0456USRE38215EPolishing apparatusEBARA CORP·Filed 2001·Granted Aug 12, 2003·4 cites·30 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →