Inventor · disambiguated record

Gey-Fung Wei

Also filed as: WEI GEY-FUNG

1 granted patent·4 citations·filing 1996–1996

24Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG1

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1 record

0130US5908041AMethod for cleaning a photoresist developer spray stream nozzleTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 1, 1999·4 cites·12 claims

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