Inventor · disambiguated record
Michael Nordin
Also filed as: NORDIN MICHAEL
7 granted patents·1 pending application·96 citations·filing 2006–2022
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0194US7960297B1Load lock design for rapid wafer heatingNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 14, 2011·44 cites·22 claims
- 0291US8052419B1Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulationNOVELLUS SYSTEMS INC·Filed 2007·Granted Nov 8, 2011·23 cites·16 claims
- 0388US8273670B1Load lock design for rapid wafer heatingRIVKIN MICHAEL·Filed 2011·Granted Sep 25, 2012·16 cites·18 claims
- 0486US11024531B2Optimized low energy / high productivity deposition systemLAM RES CORP·Filed 2018·Granted Jun 1, 2021·4 cites·16 claims
- 0583US8920162B1Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulationNORDIN MICHAEL·Filed 2011·Granted Dec 30, 2014·9 cites·20 claims
- 0666US12322641B2Mechanical indexer for multi-station process moduleLAM RES CORP·Filed 2021·Granted Jun 3, 2025·0 cites·9 claims
- 0750US2025038011A1Substrate processing tool with rapid and selective control of partial pressure of water vapor and oxygenLAM RES CORP·Filed 2022·Application pending·0 cites
- 0843US12272583B2Reduced footprint wafer handling platformLAM RES CORP·Filed 2019·Granted Apr 8, 2025·0 cites·20 claims
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