Inventor · disambiguated record
Helmut Engelke
Also filed as: ENGELKE HELMUT
8 granted patents·228 citations·filing 1979–1990
89Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0196US4426584AMethod of compensating the proximity effect in electron beam projection systemsIBM·Filed 1981·Granted Jan 17, 1984·70 cites·4 claims
- 0285US4504558AMethod of compensating the proximity effect in electron beam projection systemsIBM·Filed 1983·Granted Mar 12, 1985·26 cites·5 claims
- 0385US4417946AMethod of making mask for structuring surface areasIBM·Filed 1982·Granted Nov 29, 1983·34 cites·12 claims
- 0483US4591540AMethod of transferring a pattern into a radiation-sensitive layerIBM·Filed 1984·Granted May 27, 1986·39 cites·11 claims
- 0577US4513203AMask and system for mutually aligning objects in ray exposure systemsIBM·Filed 1984·Granted Apr 23, 1985·19 cites·23 claims
- 0674US4334156AMethod of shadow printing exposureIBM·Filed 1979·Granted Jun 8, 1982·14 cites·11 claims
- 0757US4342817AMask for structuring surface areas, and method of making itIBM·Filed 1980·Granted Aug 3, 1982·14 cites·13 claims
- 0840US5166888AFabrication of particle beam masksIBM·Filed 1990·Granted Nov 24, 1992·12 cites·6 claims
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