Inventor · disambiguated record
Michiel Puyt
Also filed as: PUYT MICHIEL
3 granted patents·13 citations·filing 2006–2010
63Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0181US8792085B2Lithographic apparatus, substrate table, and method for enhancing substrate release propertiesPUYT MICHIEL·Filed 2010·Granted Jul 29, 2014·8 cites·17 claims
- 0272US7791708B2Lithographic apparatus, substrate table, and method for enhancing substrate release propertiesASML NETHERLANDS BV·Filed 2006·Granted Sep 7, 2010·5 cites·25 claims
- 0341US7508494B2Lithographic apparatus and a subtrate table for exciting a shockwave in a substrateASML NETHERLANDS BV·Filed 2006·Granted Mar 24, 2009·0 cites·22 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →