Inventor · disambiguated record
Dakin Fulton
Also filed as: FULTON DAKIN
4 granted patents·2 pending applications·78 citations·filing 2001–2007
79Inventor score
Top patents by PatentIndex Score
6 records- 0189US6592736B2Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bathSEMITOOL INC·Filed 2002·Granted Jul 15, 2003·46 cites·57 claims
- 0282US6806186B2Submicron metallization using electrochemical depositionSEMITOOL INC·Filed 2001·Granted Oct 19, 2004·21 cites·22 claims
- 0367US7144805B2Method of submicron metallization using electrochemical deposition of recesses including a first deposition at a first current density and a second deposition at an increased current densitySEMITOOL INC·Filed 2004·Granted Dec 5, 2006·8 cites·29 claims
- 0460US6814855B2Automated chemical management system having improved analysis unitSEMITOOL INC·Filed 2001·Granted Nov 9, 2004·3 cites·26 claims
- 0552US2008264774A1Method for electrochemically depositing metal onto a microelectronic workpieceSEMITOOL INC·Filed 2007·Application pending·0 cites
- 0638US2005205111A1Method and apparatus for processing a microfeature workpiece with multiple fluid streamsRITZDORF THOMAS L·Filed 2004·Application pending·0 cites
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