Inventor · disambiguated record
Alan Cheshire
Also filed as: CHESHIRE ALAN
3 granted patents·3 pending applications·206 citations·filing 2010–2012
75Inventor score
Top patents by PatentIndex Score
6 records- 0192US8937017B2Method and apparatus for etchingCHESHIRE ALAN·Filed 2010·Granted Jan 20, 2015·101 cites·9 claims
- 0292US8298959B2Method and apparatus for etchingCHESHIRE ALAN·Filed 2010·Granted Oct 30, 2012·103 cites·20 claims
- 0358US9318341B2Methods for etching a substrateCHEBI ROBERT P·Filed 2011·Granted Apr 19, 2016·2 cites·20 claims
- 0443US2012208300A1Etch processing chamberCHESHIRE ALAN·Filed 2012·Application pending·0 cites
- 0530US2012103524A1Plasma processing apparatus with reduced effects of process chamber asymmetryCHEBI ROBERT·Filed 2011·Application pending·0 cites
- 0628US2012152900A1Methods and apparatus for gas delivery into plasma processing chambersCHEBI ROBERT P·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →