Inventor · disambiguated record
Mikhail Yurievich Loktev
Also filed as: LOKTEV MIKHAIL YURIEVICH
4 granted patents·1 pending application·4 citations·filing 2017–2022
62Inventor score
Technology areasG03F
Files withKULICKE & SOFFA LITEQ B V5
Top patents by PatentIndex Score
5 records- 0190US11550232B2Lithographic systems and methods of operating the sameKULICKE & SOFFA LITEQ B V·Filed 2020·Granted Jan 10, 2023·4 cites·38 claims
- 0275US11947271B2Lithographic systems and methods of operating the sameKULICKE & SOFFA LITEQ B V·Filed 2022·Granted Apr 2, 2024·0 cites·19 claims
- 0375US11921435B2Lithographic systems and methods of operating the sameKULICKE & SOFFA LITEQ B V·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 0454US2023161263A1Methods of patterning a photoresist, and related patterning systemsKULICKE & SOFFA LITEQ B V·Filed 2022·Application pending·0 cites
- 0533US11042095B2Optical beam homogenizer based on a lens arrayKULICKE & SOFFA LITEQ B V·Filed 2017·Granted Jun 22, 2021·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →