Inventor · disambiguated record

Shinji Tadakuma

Also filed as: TADAKUMA SHINJI

1 granted patent·52 citations·filing 1993–1993

49Inventor score

Technology areasG01V

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0176US5319216ASubstrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filterTOKYO ELECTRON LTD·Filed 1993·Granted Jun 7, 1994·52 cites·13 claims

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