Inventor · disambiguated record
Hakki Ufuk Alpay
Also filed as: ALPAY HAKKI U · ALPAY HAKKI UFUK
7 granted patents·1 pending application·190 citations·filing 1991–2006
88Inventor score
Files withDU PONT3DUPONT PHOTOMASKS INC2SCHOTT LITHOTEC AG1SCHOTT LITHOTEC USA CORP1TOPPAN PHOTOMASKS INC1
Top patents by PatentIndex Score
8 records- 0190US6911283B1Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanismDUPONT PHOTOMASKS INC·Filed 2002·Granted Jun 28, 2005·34 cites·32 claims
- 0287US6797439B1Photomask with back-side anti-reflective layer and method of manufactureSCHOTT LITHOTEC AG·Filed 2002·Granted Sep 28, 2004·38 cites·20 claims
- 0383US5415953APhotomask blanks comprising transmissive embedded phase shifterDU PONT·Filed 1994·Granted May 16, 1995·44 cites·15 claims
- 0478US5230971APhotomask blank and process for making a photomask blank using gradual compositional transition between strataDU PONT·Filed 1991·Granted Jul 27, 1993·37 cites·10 claims
- 0576US6803158B1Photomask and method for forming an opaque border on the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted Oct 12, 2004·15 cites·21 claims
- 0674US7271950B1Apparatus and method for optimizing a pellicle for off-axis transmission of lightTOPPAN PHOTOMASKS INC·Filed 2001·Granted Sep 18, 2007·14 cites·21 claims
- 0747US5459002APhotomask blanksDU PONT·Filed 1994·Granted Oct 17, 1995·8 cites·8 claims
- 0837US2008041716A1Methods for producing photomask blanks, cluster tool apparatus for producing photomask blanks and the resulting photomask blanks from such methods and apparatusSCHOTT LITHOTEC USA CORP·Filed 2006·Application pending·0 cites
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