Inventor · disambiguated record
Kazuhiko Mishima
Also filed as: MISHIMA KAZUHIKO
27 granted patents·8 pending applications·232 citations·filing 1996–2025
96Inventor score
Top patents by PatentIndex Score
35 records- 0196US9283720B2Position detection apparatus, imprint apparatus, and position detection methodCANON KK·Filed 2014·Granted Mar 15, 2016·19 cites·9 claims
- 0296US8842294B2Position detection apparatus, imprint apparatus, and position detection methodMINODA KEN·Filed 2012·Granted Sep 23, 2014·25 cites·21 claims
- 0387US8922786B2Detector, imprint apparatus, and article manufacturing methodCANON KK·Filed 2012·Granted Dec 30, 2014·9 cites·23 claims
- 0486US7019836B2Position detection method and apparatus, and exposure method and apparatusCANON KK·Filed 2002·Granted Mar 28, 2006·23 cites·6 claims
- 0582US6870623B2Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Mar 22, 2005·20 cites·28 claims
- 0680US8659743B2Detection apparatus, exposure apparatus, and device fabrication methodMISHIMA KAZUHIKO·Filed 2010·Granted Feb 25, 2014·5 cites·20 claims
- 0778US9606456B2Lithography apparatus, determination method, and method of manufacturing articleCANON KK·Filed 2015·Granted Mar 28, 2017·2 cites·13 claims
- 0878US7551281B2Position sensorCANON KK·Filed 2008·Granted Jun 23, 2009·3 cites·5 claims
- 0978US7230706B2Position detection method and apparatus, and exposure method and apparatusCANON KK·Filed 2005·Granted Jun 12, 2007·4 cites·7 claims
- 1076US9400434B2Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2014·Granted Jul 26, 2016·2 cites·17 claims
- 1175US7298500B2Position sensorCANON KK·Filed 2004·Granted Nov 20, 2007·10 cites·5 claims
- 1273US7986396B2Exposure apparatusCANON KK·Filed 2007·Granted Jul 26, 2011·3 cites·7 claims
- 1373US6707533B2Detection apparatus and exposure apparatus using the sameCANON KK·Filed 2001·Granted Mar 16, 2004·12 cites·27 claims
- 1473US5943135APosition detecting method and position detecting system using the sameCANON KK·Filed 1996·Granted Aug 24, 1999·33 cites·13 claims
- 1568US9261802B2Lithography apparatus, alignment method, and method of manufacturing articleCANON KK·Filed 2014·Granted Feb 16, 2016·1 cites·12 claims
- 1666US7450249B2Position sensorCANON KK·Filed 2007·Granted Nov 11, 2008·1 cites·7 claims
- 1765US6151121APosition detecting system and device manufacturing method using the sameCANON KK·Filed 1999·Granted Nov 21, 2000·23 cites·20 claims
- 1864US9595447B2Detection apparatus, imprint apparatus, and method of manufacturing productsCANON KK·Filed 2015·Granted Mar 14, 2017·1 cites·19 claims
- 1964US7142284B2Position detector, position detecting method, and exposure apparatus having the sameCANON KK·Filed 2004·Granted Nov 28, 2006·7 cites·9 claims
- 2061US12339595B2Measurement apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2022·Granted Jun 24, 2025·0 cites·16 claims
- 2159US12307643B2Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatusCANON KK·Filed 2021·Granted May 20, 2025·0 cites·25 claims
- 2259US6930016B2Position detection apparatus and method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2002·Granted Aug 16, 2005·8 cites·10 claims
- 2359US6335784B2Scan type projection exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Jan 1, 2002·21 cites·23 claims
- 2456US9188855B2Imprint apparatus, imprint method, and device manufacturing methodMAEDA HIRONORI·Filed 2012·Granted Nov 17, 2015·0 cites·25 claims
- 2556US2025357417A1Bonding apparatus, bonding method and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 2655US9645514B2Imprint apparatus, imprint method, and device manufacturing methodCANON KK·Filed 2015·Granted May 9, 2017·0 cites·11 claims
- 2754US9594315B2Detection apparatus, lithography apparatus and method of manufacturing articleCANON KK·Filed 2014·Granted Mar 14, 2017·0 cites·20 claims
- 2851US2009263735A1Exposure apparatusCANON KK·Filed 2009·Application pending·0 cites
- 2949US2009310106A1Exposure apparatus and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 3048US9718234B2Imprint lithography apparatus and device manufacturing method thereforCANON KK·Filed 2012·Granted Aug 1, 2017·0 cites·13 claims
- 3148US2009214962A1Exposure apparatusCANON KK·Filed 2009·Application pending·0 cites
- 3242US2013221556A1Detector, imprint apparatus and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 3340US2002048006A1Scan type projection exposure apparatus and device manufacturing method using the sameFiled 2001·Application pending·0 cites
- 3438US2005002035A1Exposure apparatusFiled 2004·Application pending·0 cites
- 3537US2010208228A1Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →