Inventor · disambiguated record

Norio Senba

Also filed as: SENBA NORIO

1 granted patent·36 citations·filing 2003–2003

45Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0180US6722798B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Apr 20, 2004·36 cites·14 claims

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