Inventor · disambiguated record
Vishnu K. Agarwal
Also filed as: AGARWAL VISHNU · AGARWAL VISHNU K · AGARWAL VISHNU KUMAR
142 granted patents·16 pending applications·4,686 citations·filing 1998–2021
99Inventor score
Files withMICRON TECHNOLOGY INC140AGARWAL VISHNU K5INOTERA MEMORIES INC2AGARWAL VISHNU1AL-SHAREEF HUSAM N1
Top patents by PatentIndex Score
158 records- 0199US7238616B2Photo-assisted method for semiconductor fabricationMICRON TECHNOLOGY INC·Filed 2005·Granted Jul 3, 2007·468 cites·30 claims
- 0299US6930041B2Photo-assisted method for semiconductor fabricationMICRON TECHNOLOGY INC·Filed 2003·Granted Aug 16, 2005·470 cites·28 claims
- 0399US6576564B2Photo-assisted remote plasma apparatus and methodMICRON TECHNOLOGY INC·Filed 2000·Granted Jun 10, 2003·478 cites·51 claims
- 0498US6667502B1Structurally-stabilized capacitors and method of making of sameMICRON TECHNOLOGY INC·Filed 2000·Granted Dec 23, 2003·164 cites·32 claims
- 0597US7936955B2Waveguide for thermo optic deviceMICRON TECHNOLOGY INC·Filed 2010·Granted May 3, 2011·20 cites·20 claims
- 0697US6670256B2Metal oxynitride capacitor barrier layerMICRON TECHNOLOGY INC·Filed 2001·Granted Dec 30, 2003·121 cites·43 claims
- 0797US6596583B2Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layersMICRON TECHNOLOGY INC·Filed 2001·Granted Jul 22, 2003·96 cites·9 claims
- 0897US6417537B1Metal oxynitride capacitor barrier layerMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 9, 2002·117 cites·47 claims
- 0996US7720341B2Waveguide for thermo optic deviceMICRON TECHNOLOGY INC·Filed 2008·Granted May 18, 2010·25 cites·25 claims
- 1096US6165834AMethod of forming capacitors, method of processing dielectric layers, method of forming a DRAM cellMICRON TECHNOLOGY INC·Filed 1998·Granted Dec 26, 2000·199 cites·30 claims
- 1195US6488575B2Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machinesMICRON TECHNOLOGY INC·Filed 2001·Granted Dec 3, 2002·39 cites·43 claims
- 1295US6297527B1Multilayer electrode for ferroelectric and high dielectric constant capacitorsMICRON TECHNOLOGY INC·Filed 1999·Granted Oct 2, 2001·97 cites·54 claims
- 1395US6206759B1Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machinesMICRON TECHNOLOGY INC·Filed 1998·Granted Mar 27, 2001·146 cites·56 claims
- 1494US6537912B1Method of forming an encapsulated conductive pillarMICRON TECHNOLOGY INC·Filed 2000·Granted Mar 25, 2003·79 cites·57 claims
- 1593US6323046B1Method and apparatus for endpointing a chemical-mechanical planarization processMICRON TECHNOLOGY INC·Filed 1998·Granted Nov 27, 2001·98 cites·87 claims
- 1693US6198144B1Passivation of sidewalls of a word line stackMICRON TECHNOLOGY INC·Filed 1999·Granted Mar 6, 2001·97 cites·32 claims
- 1792US7359607B2Waveguide for thermo optic deviceMICRON TECHNOLOGY INC·Filed 2004·Granted Apr 15, 2008·34 cites·61 claims
- 1892US7006746B2Waveguide for thermo optic deviceMICRON TECHNOLOGY INC·Filed 2002·Granted Feb 28, 2006·38 cites·29 claims
- 1992US6900497B2Integrated circuit with a capacitor comprising an electrodeMICRON TECHNOLOGY INC·Filed 2004·Granted May 31, 2005·43 cites·10 claims
- 2092US6784504B2Methods for forming rough ruthenium-containing layers and structures/methods using sameMICRON TECHNOLOGY INC·Filed 2001·Granted Aug 31, 2004·43 cites·11 claims
- 2192US6746916B2Method for forming a multilayer electrode for a ferroelectric capacitorMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 8, 2004·48 cites·51 claims
- 2292US6429127B1Methods for forming rough ruthenium-containing layers and structures/methods using sameMICRON TECHNOLOGY INC·Filed 2000·Granted Aug 6, 2002·45 cites·38 claims
- 2392US6365453B1Method and structure for reducing contact aspect ratiosMICRON TECHNOLOGY INC·Filed 1999·Granted Apr 2, 2002·86 cites·19 claims
- 2492US6361832B1Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machinesMICRON TECHNOLOGY INC·Filed 2000·Granted Mar 26, 2002·72 cites·12 claims
- 2591US6986700B2Apparatuses for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assembliesMICRON TECHNOLOGY INC·Filed 2003·Granted Jan 17, 2006·29 cites·6 claims
- 2691US6911381B2Boron incorporated diffusion barrier materialMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 28, 2005·37 cites·49 claims
- 2791US6777739B2Multilayer electrode for a ferroelectric capacitorMICRON TECHNOLOGY INC·Filed 2001·Granted Aug 17, 2004·42 cites·53 claims
- 2891US6744093B2Multilayer electrode for a ferroelectric capacitorMICRON TECHNOLOGY INC·Filed 2001·Granted Jun 1, 2004·42 cites·6 claims
- 2991US6720609B2Structure for reducing contact aspect ratiosMICRON TECHNOLOGY INC·Filed 2002·Granted Apr 13, 2004·40 cites·9 claims
- 3091US6612901B1Apparatus for in-situ optical endpointing of web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assembliesMICRON TECHNOLOGY INC·Filed 2000·Granted Sep 2, 2003·34 cites·31 claims
- 3190US6465828B2Semiconductor container structure with diffusion barrierMICRON TECHNOLOGY INC·Filed 1999·Granted Oct 15, 2002·91 cites·151 claims
- 3288US7268072B2Method and structure for reducing contact aspect ratiosMICRON TECHNOLOGY INC·Filed 2005·Granted Sep 11, 2007·10 cites·19 claims
- 3388US6897160B2Methods for forming rough ruthenium-containing layers and structures/methods using sameMICRON TECHNOLOGY INC·Filed 2001·Granted May 24, 2005·28 cites·23 claims
- 3488US6630391B2Boron incorporated diffusion barrier materialMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 7, 2003·27 cites·18 claims
- 3588US6517668B2Method and apparatus for endpointing a chemical-mechanical planarization processMICRON TECHNOLOGY INC·Filed 2001·Granted Feb 11, 2003·29 cites·5 claims
- 3688US6472264B1Device and method for protecting against oxidation of a conductive layer in said deviceMICRON TECHNOLOGY INC·Filed 2000·Granted Oct 29, 2002·24 cites·11 claims
- 3788US6258171B1Direct liquid injection system with on-line cleaningMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 10, 2001·29 cites·8 claims
- 3888US6201276B1Method of fabricating semiconductor devices utilizing in situ passivation of dielectric thin filmsMICRON TECHNOLOGY INC·Filed 1998·Granted Mar 13, 2001·62 cites·27 claims
- 3987US6095085APhoto-assisted remote plasma apparatus and methodMICRON TECHNOLOGY INC·Filed 1998·Granted Aug 1, 2000·60 cites·27 claims
- 4086US6218256B1Electrode and capacitor structure for a semiconductor device and associated methods of manufactureMICRON TECHNOLOGY INC·Filed 1999·Granted Apr 17, 2001·56 cites·12 claims
- 4185US7282756B2Structurally-stabilized capacitors and method of making of sameMICRON TECHNOLOGY INC·Filed 2003·Granted Oct 16, 2007·29 cites·17 claims
- 4285US6468854B1Device and method for protecting against oxidation of a conductive layer in said deviceMICRON TECHNOLOGY INC·Filed 2000·Granted Oct 22, 2002·18 cites·2 claims
- 4385US6153529APhoto-assisted remote plasma apparatus and methodMICRON TECHNOLOGY INC·Filed 2000·Granted Nov 28, 2000·24 cites·38 claims
- 4484US6953721B2Methods of forming a capacitor with an amorphous and a crystalline high K capacitor dielectric regionMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 11, 2005·25 cites·43 claims
- 4584US6833576B2Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layersMICRON TECHNOLOGY INC·Filed 2001·Granted Dec 21, 2004·20 cites·13 claims
- 4684US6607975B1Device and method for protecting against oxidation of a conductive layer in said deviceMICRON TECHNOLOGY INC·Filed 2000·Granted Aug 19, 2003·17 cites·2 claims
- 4783US7446363B2Capacitor including a percentage of amorphous dielectric material and a percentage of crystalline dielectric materialMICRON TECHNOLOGY INC·Filed 2006·Granted Nov 4, 2008·6 cites·24 claims
- 4883US6562182B2Method and apparatus for endpointing a chemical-mechanical planarization processMICRON TECHNOLOGY INC·Filed 2001·Granted May 13, 2003·19 cites·11 claims
- 4983US6511900B2Boron incorporated diffusion barrier materialMICRON TECHNOLOGY INC·Filed 2000·Granted Jan 28, 2003·19 cites·6 claims
- 5083US6346746B1Capacitor and electrode structures for a semiconductor deviceMICRON TECHNOLOGY INC·Filed 2000·Granted Feb 12, 2002·27 cites·67 claims
Showing the top 50 of 158 patent records by PatentIndex Score.
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