Inventor · disambiguated record
Junji Hazama
Also filed as: HAZAMA JUNJI
14 granted patents·950 citations·filing 1982–2000
94Inventor score
Top patents by PatentIndex Score
14 records- 0197US5500736AMethod of detecting positionsNIKON CORP·Filed 1994·Granted Mar 19, 1996·473 cites·2 claims
- 0293US5191374AExposure control apparatusNIKON CORP·Filed 1991·Granted Mar 2, 1993·104 cites·20 claims
- 0391US5486896AExposure apparatusNIKON CORP·Filed 1994·Granted Jan 23, 1996·80 cites·13 claims
- 0484US6583854B1Method and apparatus for the manufacture of circuits for a large display device using stitch exposureNIKON CORP·Filed 2000·Granted Jun 24, 2003·32 cites·19 claims
- 0584US4636626AApparatus for aligning mask and wafer used in semiconductor circuit element fabricationNIPPON KOGAKU KK·Filed 1984·Granted Jan 13, 1987·38 cites·25 claims
- 0682US4718767AMethod of inspecting the pattern on a photographic maskNIPPON KOGAKU KK·Filed 1984·Granted Jan 12, 1988·37 cites·8 claims
- 0773US4589139AApparatus for detecting defects in patternNIPPON KOGAKU KK·Filed 1983·Granted May 13, 1986·48 cites·10 claims
- 0873US4506382AApparatus for detecting two-dimensional pattern and method for transforming the pattern into binary imageNIPPON KOGAKU KK·Filed 1982·Granted Mar 19, 1985·45 cites·4 claims
- 0972US4479145AApparatus for detecting the defect of patternNIPPON KOGAKU KK·Filed 1982·Granted Oct 23, 1984·44 cites·10 claims
- 1065US5640243APosition detection methodNIKON CORP·Filed 1995·Granted Jun 17, 1997·25 cites·6 claims
- 1155US6211965B1Photolithographic position measuring laser interferometer with relitively moving measuring intereometerNIKON CORP·Filed 1999·Granted Apr 3, 2001·15 cites·57 claims
- 1232US4472738APattern testing apparatusNIPPON KOGAKU KK·Filed 1982·Granted Sep 18, 1984·8 cites·2 claims
- 1329US4537501AApparatus for the attitude control of plate-form bodyNIPPON KOGAKU KK·Filed 1984·Granted Aug 27, 1985·0 cites·10 claims
- 1426US4685805ASmall gap measuring apparatusNIPPON KOGAKU KK·Filed 1985·Granted Aug 11, 1987·1 cites·10 claims
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