Inventor · disambiguated record
Steven J. Haney
Also filed as: HANEY STEVEN · HANEY STEVEN J · HANEY STEVEN JULIAN
12 granted patents·305 citations·filing 1983–2003
91Inventor score
Top patents by PatentIndex Score
12 records- 0194US6031598AExtreme ultraviolet lithography machineEUV LLC·Filed 1998·Granted Feb 29, 2000·148 cites·20 claims
- 0291US6333775B1Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 1999·Granted Dec 25, 2001·82 cites·10 claims
- 0374US6192897B1Apparatus and method for in-situ cleaning of resist outgassing windowsEUV LLC·Filed 1999·Granted Feb 27, 2001·26 cites·23 claims
- 0471US6545745B2Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 2001·Granted Apr 8, 2003·9 cites·25 claims
- 0564US6549264B2Extreme-UV lithography vacuum chamber zone sealEUV LLC·Filed 2001·Granted Apr 15, 2003·6 cites·25 claims
- 0661US6642995B2Mask-to-wafer alignment systemEUV LLC·Filed 2001·Granted Nov 4, 2003·7 cites·34 claims
- 0761US6328282B1Motorized support jackEUV LLC·Filed 2000·Granted Dec 11, 2001·7 cites·9 claims
- 0850US7195354B2Adaptive ophthalmologic systemUNIV CALIFORNIA·Filed 2003·Granted Mar 27, 2007·12 cites·25 claims
- 0948US6561486B2Motorized support jackEUV LLC·Filed 2001·Granted May 13, 2003·1 cites·13 claims
- 1038US6900952B2System and method for reproducibly mounting an optical elementSANDIA NAT LAB·Filed 2003·Granted May 31, 2005·1 cites·23 claims
- 1134US6734422B2Portable outgas detection apparatusEUV LLC·Filed 2001·Granted May 11, 2004·0 cites·12 claims
- 1234US4538068AManipulator having thermally conductive rotary joint for transferring heat from a test specimenUS ENERGY·Filed 1983·Granted Aug 27, 1985·6 cites·16 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →