Inventor · disambiguated record
Chun-Liang Fan
Also filed as: FAN CHUN-LIANG
3 granted patents·171 citations·filing 1999–2013
72Inventor score
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3 records- 0193US6764810B2Method for dual-damascene formation using a via plugTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 20, 2004·150 cites·20 claims
- 0257US8884441B2Process of ultra thick trench etch with multi-slope profileTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Nov 11, 2014·1 cites·13 claims
- 0352US6080627AMethod for forming a trench power metal-oxide semiconductor transistorMOSEL VITELIC INC·Filed 1999·Granted Jun 27, 2000·20 cites·20 claims
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