Inventor · disambiguated record
Robert Fichtl
Also filed as: FICHTL ROBERT
2 granted patents·1 citations·filing 2017–2020
31Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0168US10146138B2Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Dec 4, 2018·1 cites·15 claims
- 0256US11980990B2Method for machining a workpiece in the production of an optical elementZEISS CARL SMT GMBH·Filed 2020·Granted May 14, 2024·0 cites·15 claims
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