Inventor · disambiguated record
Sergey Tarabrin
Also filed as: TARABRIN SERGEY
9 granted patents·2 pending applications·9 citations·filing 2017–2022
80Inventor score
Files withASML NETHERLANDS BV11
Top patents by PatentIndex Score
11 records- 0186US10795269B2Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·3 cites·15 claims
- 0283US12105432B2Metrology method and associated computer productASML NETHERLANDS BV·Filed 2020·Granted Oct 1, 2024·2 cites·20 claims
- 0375US11150563B2Method of measuring a parameter of a patterning process, metrology apparatus, targetASML NETHERLANDS BV·Filed 2019·Granted Oct 19, 2021·1 cites·21 claims
- 0475US10691031B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2018·Granted Jun 23, 2020·1 cites·20 claims
- 0573US10598483B2Metrology method, apparatus and computer programASML NETHERLANDS BV·Filed 2017·Granted Mar 24, 2020·1 cites·18 claims
- 0673US10599048B2Metrology apparatus, method of measuring a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 24, 2020·1 cites·15 claims
- 0768US11409204B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
- 0856US2024361705A1Metrology method and deviceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0953US11042100B2Measurement apparatus and method of measuring a targetASML NETHERLANDS BV·Filed 2019·Granted Jun 22, 2021·0 cites·13 claims
- 1044US10585048B2Method of determining a value of a parameter of interest of a target formed by a patterning processASML NETHERLANDS BV·Filed 2019·Granted Mar 10, 2020·0 cites·21 claims
- 1143US2022082944A1Method for metrology optimizationASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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