Inventor · disambiguated record

Douglas S. Spaeth

Also filed as: SPAETH DOUGLAS S

1 granted patent·1 citations·filing 2004–2004

15Inventor score

Technology areasH10P

Files withFSI INT INC1

Top patents by PatentIndex Score

1 record

0138US7556697B2System and method for carrying out liquid and subsequent drying treatments on one or more wafersFSI INT INC·Filed 2004·Granted Jul 7, 2009·1 cites·11 claims

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