Inventor · disambiguated record
Johannes Josephina Moors
Also filed as: JOSEPHINA MOORS JOHANNES HUBERTUS
2 granted patents·1 pending application·6 citations·filing 2009–2010
53Inventor score
Top patents by PatentIndex Score
3 records- 0179US8419862B2Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement thereforEHM DIRK HEINRICH·Filed 2010·Granted Apr 16, 2013·4 cites·8 claims
- 0252US8373846B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Feb 12, 2013·2 cites·20 claims
- 0336US2011043777A1Target material, a source, an euv lithographic apparatus and a device manufacturing method using the sameASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
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