Inventor · disambiguated record
Chi-Yun Tseng
Also filed as: TSENG CHI-YUN
3 granted patents·71 citations·filing 1999–2012
65Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0176US6206441B1Apparatus and method for transferring wafers by robotTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 27, 2001·69 cites·16 claims
- 0262US9997384B2Methods for transporting wafers between wafer holders and chambersKU SHAO YEN·Filed 2011·Granted Jun 12, 2018·2 cites·20 claims
- 0333US9263337B2Semiconductor device and method of manufactureCHOU CHUN-LI·Filed 2012·Granted Feb 16, 2016·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →