Inventor · disambiguated record
Samuel Kalt
Also filed as: KALT SAMUEL
3 granted patents·61 citations·filing 1998–2006
73Inventor score
Top patents by PatentIndex Score
3 records- 0194US8039813B2Charged particle-optical systems, methods and componentsZEISS CARL SMT GMBH·Filed 2006·Granted Oct 18, 2011·32 cites·57 claims
- 0253US5935739AManufacturing method for membrane lithography mask with mask fieldsIBM·Filed 1998·Granted Aug 10, 1999·19 cites·11 claims
- 0344US6004700AMembrane mask for electron beam lithographyIBM·Filed 1998·Granted Dec 21, 1999·10 cites·11 claims
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