Inventor · disambiguated record

Hea-Young Yoon

Also filed as: YOON HEA-YOUNG

1 granted patent·12 citations·filing 2002–2002

34Inventor score

Technology areasH01J

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0172US6835919B2Inductively coupled plasma systemSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Dec 28, 2004·12 cites·22 claims

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